Advances in Optical Surface Texture Metrology.

Intro -- Preface -- Editor biography -- Richard Leach -- List of contributors -- Chapter 1 Terms and definitions -- 1.1 Introduction -- 1.2 General metrology terms and definitions -- 1.3 Surface terms and definitions -- References -- Chapter 2 Coherence scanning interferometry -- 2.1 Introduction -- 2.2 Applications -- 2.2.1 Surface finish characterisation -- 2.2.2 Measurement of highly sloped surfaces -- 2.2.3 Additive manufactured surfaces -- 2.2.4 Film measurement -- 2.2.5 Functional imaging -- 2.3 Technical advances -- 2.3.1 Surface reconstruction methods -- 2.3.2 Enhancement of the signal-to-noise ratio -- 2.3.3 Enhancement of measurement resolution and bandwidth -- 2.3.4 Pupil-plane imaging in CSI -- 2.3.5 Light sources -- 2.3.6 System design -- 2.4 Theoretical modelling of CSI -- 2.4.1 One-dimensional signal modelling -- 2.4.2 Two-dimensional imaging model and transfer function -- 2.4.3 Three-dimensional imaging model and transfer function -- 2.4.4 Image formation beyond the linear regime -- 2.5 Calibration and error correction -- 2.5.1 Noise -- 2.5.2 Linearity and amplification -- 2.5.3 Lateral distortion -- 2.5.4 Optical aberrations -- 2.5.5 Multiple materials -- 2.5.6 Steeply sloped surfaces -- 2.5.7 Instrument transfer function and resolution -- Acknowledgements -- References -- Chapter 3 Focus variation -- 3.1 Introduction to focus variation -- 3.1.1 Basic principles of focus variation -- 3.1.2 Algorithms for focus variation -- 3.2 Advances in focus variation -- 3.2.1 Measurement of smooth surfaces -- 3.2.2 Measurement of vertical walls and holes using vertical focus probing -- 3.2.3 In-process surface measurements -- 3.3 Case studies -- 3.3.1 Case study for measurement of smooth surfaces -- 3.3.2 Case study for vertical focus probing -- 3.3.3 Case study for in-process surface measurement -- 3.4 Conclusions and outlook -- References.

Chapter 4 Imaging confocal microscopy -- 4.1 Introduction -- 4.2 Confocal microscopy in the ISO 25178 framework -- 4.2.1 Laser scan, disc scan and microdisplay scan confocal microscopes -- 4.2.2 Calibration, adjustment, performance specifications and influence factors for imaging confocal microscopes -- 4.3 Structured illumination microscopy -- 4.4 Simultaneous confocal and focus variation in a single acquisition scan -- 4.5 Active illumination focus variation: the 'poor person's confocal microscopy' -- References -- Chapter 5 Non-scanning techniques -- 5.1 Introduction to non-scanning techniques -- 5.1.1 Scanning versus non-scanning techniques -- 5.1.2 Definition of a non-scanning technique -- 5.2 Wavelength scanning interferometry -- 5.2.1 Advances in wavelength scanning interferometry -- 5.3 Dispersed reference interferometry -- 5.3.1 Advances in dispersive reference interferometry -- 5.4 Chromatic confocal microscopy -- 5.4.1 Advances in chromatic confocal microscopy -- 5.5 Micro-scale fringe projection -- 5.5.1 Advances in micro-scale FP -- References -- Chapter 6 Scattering approaches -- 6.1 Introduction -- 6.2 Basic principles -- 6.3 Advanced systems -- 6.3.1 Advanced systems for mechanical engineering and manufacturing -- 6.3.2 Advanced systems for semiconductor manufacturing -- 6.4 Advanced scattering algorithms -- 6.5 Accelerated computational technologies -- 6.6 Summary -- References -- Chapter 7 In-process surface topography measurements -- 7.1 Introduction -- 7.1.1 Definitions -- 7.2 Environmental issues -- 7.2.1 Temperature, pressure and humidity variation -- 7.2.2 Vibration -- 7.2.3 Contamination -- 7.3 Development challenges -- 7.3.1 Measurement method -- 7.3.2 Measurement speed -- 7.3.3 System integration and control -- 7.3.4 Traceability -- 7.3.5 Intelligence -- 7.4 Recent advances and developments.

7.4.1 Recent advances in instrument development -- 7.4.2 Methodology to develop fast and accurate in-process measuring instruments -- 7.5 Summary and future outlook -- References.

Latest advances in the science and application of optical instruments for the measurement of surface texture.

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Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.