Micro and Nanomanufacturing Research.

Intro -- MICRO AND NANOMANUFACTURING RESEARCH -- MICRO AND NANOMANUFACTURING RESEARCH -- Contents -- Preface -- Micromanufacturing Using X-ray Lithographic Technologies -- Abstract -- 1. Introduction -- 2. X-RAY Lithography -- 3. Synchrotron Radiation (SR) -- 3.1. General Characteristics -- 3.2. Spectral Characteristics -- 3.3. Spectral Brilliance and Brightness -- 4. Microfabrication Process -- 4.1. General -- 4.2. LIGA Process -- 4.3. Lithography Steps -- 4.4. X-ray Lithography -- 4.4.1. X-Ray Masks -- 4.4.2. Mask Materials -- 4.4.3. Single-layer Absorber Fabrication -- 4.4.4. Alignment of X-Ray Mask -- 4.4.5. Masks for High-Aspect-Ratio Microlithography -- 4.4.6. Choice of Resist Substrate -- 4.4.7. Resist Requirements -- 4.4.8. Methods of Resist Application -- Multiple Spin Coats -- Commercial PMMA Sheets -- Casting of PMMA -- Resist Adhesion -- Stress-Induced Cracks in PMMA -- 4.4.9. Exposure -- Optimal Wavelength -- 4.4.10. Deposited Dose -- 4.4.11. Stepped and Slanted Microstructures -- 4.4.12. Master Micromold Fabrication Methods -- 5. Conclusions -- References -- Mechanistic Modeling Approach for Micro Milling Cutting Forces -- Abstract -- Nomenclature -- 1. Introduction -- 2. Mechanistic Cutting Force Model -- 2.1. Chip Thickness Modeling -- 2.2. Force Model Development in the Ploughing Dominant Regime -- 2.3. Force Model Development in the Shearing Dominant Regime -- 3. Experimental Setup -- 4. Calibration and Parameter Estimation -- 5. Model Validation -- 4. Discussions -- 5. Conclusion -- References -- A Study on Surface Quality in Micromilling -- Abstract -- 1. Introduction -- 2. Experimental Procedure -- 2.1. CAD/CAM Software -- 2. Experimental Setup -- 2.3. Workpiece Material -- 2.4. Cutting Parameters / Machining Strategies -- 2. Surface Quality Characterization -- 3. Results and Discussion -- 4. Conclusions -- Acknowledgments.

References -- Numerical Simulation and Experimental Validation when Precision Radial Turning AISI 1045 Steel -- Abstract -- 1. Introduction -- 2. Experimental Procedure -- 3. Finite Elements Analysis -- 4. Results and Discussion -- 4.1. Cutting and Thrust Forces -- 4.2. Cutting Temperature -- 4.3. Plastic Strain -- 5. Conclusions -- Acknowledgments -- References -- The Effect of Cutting Speed on Cutting Forces and Surface Finish when Micro-turning Polyamides -- Abstract -- Introduction -- 2. Experimental Procedure -- 3. Results and Discussion -- 4. Conclusion -- Acknowledgments -- References -- Pulsed Droplet Micromachining of Abrasive Materials -- Abstract -- 1. Introduction -- 2. Pulsed Droplet Impact -- 3. Water Droplet Impact -- 3.1. Circumferential Damage -- 3.2. Lateral Jet Formations -- 4. Machining Threshold Modelling -- 4.1. Machining Threshold Model -- 4.2. Quasi-static Stress Intensity -- 4.3. Dynamic Stress Intensity Factor -- 4.4. Simulation of Liquid Droplet Micromachining -- 4.5. Machining Threshold Curves -- 5. Micromachining Results -- 5.1. Silicon Carbide -- 5.2 .Alumina -- 5.3. Magnesium Fluoride -- 6. Material Removal Rates -- 7. Design of Machine Tools for Liquid Droplet Micromachining -- 8. Analysis of Space Frame -- 8.1. Finite Element Model -- 8.2. Closed-form Solution Model -- 9. Mode shapes of Tetrahedral Structures -- 9.1. Experimental Method -- 9.2. Experimental Procedure -- 9.3. Experimental Analysis -- 10. Discussion and Conclusions -- References -- Some Aspects of Non-conventional Micro Machining Technology: An Overview -- Abstract -- 1. Introduction -- 2. Micro Electrochemical Machining (Micro ECM) -- 2.1. Micro ECM Techniques -- 2.1.1. Micro ECM through-Maskless -- 2.1.2. Micro ECM through-Mask -- 2.2. Micro ECM Applications -- 2.2.1. Fabrication of Microelectronic Components -- 2.2.2. Ink-jet Nozzle Plates.

2.2.3. Metal Masks -- 2.2.4. Micro Hole Drilling -- 2.2.5. Micro Surface Production -- 3. Micro Electrodischarge Machining (Micro EDM) -- 3.1. Micro EDM Techniques -- 3.2. Micro EDM Applications -- 3.2.1. Micro EDM of Ceramics -- 3.2.2. Micro Electrodes for EDM and Micro-Pins -- 3.2.3. Ink-Jet Nozzle -- 3.2.4. Micro Hole Drilling -- 3.2.5. Micro Surface Production -- 4. Micro Laser Machining (Micro LM) -- 4.1. Micro LM Techniques -- 4.1.1. Mask Projection Technique -- 4.1.2. Direct Writing Technique -- 4.2. Micro LM Applications -- 4.2.1. Micro Machining of Electrostatic Electron Lenses -- 4.2.2. Micro Hole Drilling -- 4.2.3. Manufacturing of 3D Structures -- 5. Micro Ultrasonic Machining (Micro USM) -- 5.1. Micro USM Tools -- 5.2. Micro USM Applications -- 5.2.1. Micro Hole Drilling -- 5.2.2. Manufacturing of 3D Structures -- 7. Summary and Conclusions -- References -- Manufacturing and Application of Micro/Nano Fluidic Devices -- Abstract -- 1. Micro/nano Fluidic Components -- 1.1. Nanochannels -- 1.2. Micromixers -- 1.3. Micropumps -- 1.4. Microvalves -- 2. Material and Manufacturing Techniques -- 2.1. Silicon and Glass -- 2.2. Polydimethylsiloxane -- 2.3. Thermoplastic Polymer -- 3. Micro/nano Manufacturing of Thermoplastics-based Lab-on-a-chip -- 3.1. Micro/nano Machining Process -- 3.1.1. Master Fabrication -- 3.1.2. Hot Embossing -- 3.1.3. Micro-injection Molding -- 3.1.4. Electrode Integration -- 3.1.5. Thermal Bonding -- 3.2. Automatic Manufacturing Equipment -- 4. Development of Liquid-feed Micro Direct Methanol Fuel Cells on Silicon Substrate and Metal Foil Using Microfabrication -- 4.1. Introduction -- 4.2. Silicon Micromachining for μDMFC -- 4.2.1. Design of the Silicon μDMFC Demonstrator -- 4.2.2. Microfabrication of Silicon Polar Plates -- 4.2.3. Packaging and Test of the Silicon μDMFC.

4.3. Micro Photochemical Etching (μPCE) of the Stainless Steel Polar Plates -- 4.3.1. Fundamental of μPCE Accuracy Control -- 4.3.2. Experiments -- 4.3.3. Fabricate (DMFC with Taper Flow Channel Using (PCE -- References -- Index.

Description based on publisher supplied metadata and other sources.

Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.